HIGH-BRIGHTNESS HALOGEN/LED LIGHT SOURCE DEVICE
High-brightness halogen and LED light sources are macro-observation lighting devices for detecting various defects such as foreign matter, scratches, polishing irregularities, haze, and slips on the final finished surface of semiconductor wafers and liquid crystal substrates during the processing stage, which is the most labor-intensive part of the process. With an illuminance more than four times that of sunlight, it becomes possible to detect minute defects that would normally be overlooked.
Application example
Wafer and glass substrate inspection
High-brightness halogen light source device specifications
Lamp housing section (propeller fan type / duct fan type)
| YP-150I | YP-250I | |
| Irradiation diameter | 30mmφ | 40mmφ |
| Illuminance | 400,000Lx以上 | ← |
| Irradiation distance | 140mm | 220mm |
| Light source | Lamp with dichroic mirror | ← |
| Lamp type | JCR15V150W（USHIO） | FLC24V250W（OSRAM） |
| Lamp life | 30～50 hour | ← |
| Color temperature | 3,400K | ← |
| Tone | White | ← |
| Environmental temperature | 0～40℃ | ← |
| Cooling method | Forced fan air cooling | ← |
| Connection | 12φIncludes mounting shaft | 20φIncludes mounting shaft |
| Size | 102(W)×351(H)×128(D)mm | 122(W)×394(H)×131(D)mm |
| Weight | 2.65㎏ | 3.59㎏ |
Power supply section
| HPS-150（For YP-150I only） | HPS-250（For YP-250I only） | |
| Input power | AC100～240V 50/60Hz | AC100～240V 50/60Hz |
| Power consumption | 200W | 350W |
| Lighting method | DC lighting method | ← |
| Light intensity adjustment | Voltage adjustable | ← |
| Overall volatility | 1％MAX（Input-to-input, drift, and temperature fluctuations） | ← |
| Environmental temperature | 0～40℃ | ← |
| Cooling method | Forced fan air cooling | ← |
| Size | 134(W)×78(H)×193(D)mm | 134(W)×78(H)×253(D)mm |
| Weight | 1.8㎏ | 2.2㎏ |
High-brightness LED light source specifications
Lamp housing section (propeller fan type only)
| YP-250IL | |
| Irradiation diameter | 40mmφ |
| Illuminance | 400,000Lx以上 |
| Irradiation distance | 220mm |
| light source | LED |
| light life | 10,000 hour |
| Tone | White |
| Environmental temperature | 0～40℃ |
| Cooling method | Forced fan air cooling |
| Connection | 20φIncludes mounting shaft |
| Size | 107(W)×229(H)×114(D)mm |
| Weight | 2.94㎏ |
Power supply section
| LPS-250（YP-250IL exclusive） | |
| Input power | AC100～240V 50/60Hz |
| Power consumption | 200W |
| Lighting method | DC lighting method |
| Light intensity adjustment | Current adjustable |
| Overall volatility | 1％MAX（Input-to-input, drift, and temperature fluctuations） |
| Environmental temperature | 0～40℃ |
| Cooling method | Forced fan air cooling |
| Size | 100(W)×117(H)×195(D)mm |
| Weight | 1.65㎏ |